ELECTROGRIP ELECTRONICS CAPABILITIES

• High performance chuck drive power supplies:
  • Full chuck drive and substrate sensing capabilities
  • Total electrical and mechanical isolation; float with chucks and substrates
  • Powered by rf or infrared duplex communications link
• Servomotors and servo drives:
  • High force motors with 1 micron encoder resolution
  • All capable of working in vacuum and all isolated, as with the chuck drive supplies
• Multiple chuck, motor applications:
  • Multidrop power and communications permit up to 250 motor, GPIO, and chuck drive modules to be powered from a single DR5A base station controller
  • Power up to 50W at vacuum-, rf- and motion- isolated nodes
• Process compatibility:
  • Compatible with EUV lithography tools, UHV chambers
  • Multi-frequency rf plasma processing
  • Ultra-low power vacuum electronics for at-chuck drive
• Telemetry options:
  • At-chuck GPIO permits multi-position thermal and other sensor monitoring and analog controls, plus control and sensor powering
• Legacy system support:
  • GC System controllers, Rf decoupler filters, and DR4 model drivers are all supported, but not recommended for new design
• Electronics special design:
  • Custom hardware and software design capability for special needs
• Electrogrip-standard systems available with shorter lead times.