ELECTROGRIP FACILITIES

• Chuck weight, linear dimension machine limits:
  • Up to 2500kg mass, up to 3m width chucks
• Diagnostic equipment:
  • Wafer contamination and surface microstructure
    • Surface particle scanner ***RECENT (2005) ACQUISITION***
    • Surface profilometer
    • Scanning Electron Microscope with X-ray Energy Dispersive Analyser
  • Size calibration
    • Scanning CMM with cal standards
  • Vacuum performance
    • Full vacuum immersion and test capabilities with QMS, He leak, turbo/cryo/drypumping, gas injection, and wideband rf sources
• CNC machines:
  • Laser, diamond, metal cutting, fluid jet cutting, and chuck surfacing stations, plus manual support equipment
  • Prototyping and low-quantity production of components in any material
• Welding:
  • Orbital and manual TIG stations
• Grinding:
  • Flat grinding, edging, CNC finish grinding, optical polishing (7 stations)
• Clean room:
  • 3,000 square feet
  • Used for chuck production, test, and packaging
• Electronics development:
  • 10,000 square feet
  • Used for prototyping, CE standard testing, and final module assembly