ELECTROGRIP FACILITIES
- Chuck weight, linear dimension machine limits:
- Up to 2500kg mass, up to 3m width chucks
- Diagnostic equipment:
- Wafer contamination and surface microstructure
- Surface particle scanner ***RECENT (2005) ACQUISITION***
- Surface profilometer
- Scanning Electron Microscope with X-ray Energy Dispersive Analyser
- Size calibration
- Scanning CMM with cal standards
- Vacuum performance
- Full vacuum immersion and test capabilities with QMS, He leak, turbo/cryo/drypumping, gas injection, and wideband rf sources
- CNC machines:
- Laser, diamond, metal cutting, fluid jet cutting, and chuck surfacing stations, plus manual support equipment
- Prototyping and low-quantity production of components in any material
- Welding:
- Orbital and manual TIG stations
- Grinding:
- Flat grinding, edging, CNC finish grinding, optical polishing (7 stations)
- Clean room:
- 3,000 square feet
- Used for chuck production, test, and packaging
- Electronics development:
- 10,000 square feet
- Used for prototyping, CE standard testing, and final module assembly