Electrogrip Products Overview:

Electrostatic chuck surfaces from Electrogrip may be

• economical, durable polymers;
• strengthened quartz or sapphire
  • ... for cryogenic through medium temperatures; or
• low-particle robust ceramic/amorphous coatings
  • ... for cryogenics to 800 degrees C.

Chuck support electronics includes

• multiphase high voltage power supplies,
• MESC (mobile electrostatic chuck) charging stations, and
• gas flow, motor, and system controls.

High Rate Etch/Deposition High Density Plasma System:

• self cleaning for pinhole-free films;
• high rate at low plasma pressure;
• easy control of gap fill and conformality.

Gas flow controls are trouble-free:

• high stability even at low chuck gas flow rates of 0.05sccm He;
• constantly self-calibrating during operation;
• gas-independent absolute volumetric flow calibration;
• 100:1 operating dynamic range with full 0.1% accuracy in one device;
• holds accuracy while informing users of fouling for perfect predictive maintenance.

Chuck integration hardware eases installation into plasma process tools:

• standard CP chuck designs and hardware,
• rf gas breaks,
• interface enclosures, and
• motor assemblies.
• Retrofit kits are also available for etch and PVD systems;
  complete and qualified changeover support for
  Lam 384T^® and Applied Materials Endura^® / MCA^®
  to enable reliable processing of all wafer types.

Vacuum system design is available

... for all or part of the chuck environment.

DepEtchPro control software permits rapid on-the-fly automation of new tools,

... and can quickly replace and future-proof existing tool control systems.