Electrogrip Products Overview:
Electrostatic chuck surfaces from Electrogrip may be
- economical, durable polymers;
- strengthened quartz or sapphire
- ... for cryogenic through medium temperatures; or
- low-particle robust ceramic/amorphous coatings
- ... for cryogenics to 800 degrees C.
Chuck support electronics includes
High Rate Etch/Deposition High Density Plasma System:
- self cleaning for pinhole-free films;
- high rate at low plasma pressure;
- easy control of gap fill and conformality.
Gas flow controls are trouble-free:
- high stability even at low chuck gas flow rates of 0.05sccm He;
- constantly self-calibrating during operation;
- gas-independent absolute volumetric flow calibration;
- 100:1 operating dynamic range with full 0.1% accuracy in one device;
- holds accuracy while informing users of fouling for perfect predictive maintenance.
Chuck integration hardware eases installation into plasma process tools:
- standard CP chuck designs and hardware,
- rf gas breaks,
- interface enclosures, and
- motor assemblies.
- Retrofit kits are also available for etch and PVD systems;
complete and qualified changeover support for
Lam 384T® and Applied Materials Endura® / MCA®
to enable reliable processing of all wafer types.
Vacuum system design is available
... for all or part of the chuck environment.
DepEtchPro control software permits rapid on-the-fly automation of new tools,
... and can quickly replace and future-proof existing tool control systems.