Electrogrip support services:

• tutorials on electrostatic chuck operation and installation
• courses on vacuum technology and plasma processing
• on-site diagnosis of electrostatic chuck problems
• system vacuum and thermal design to meet stringent requirements
• installation / system qualification of Electrogrip chucks
• assurance of operation to specification under process conditions

Please email us for more information.

For retrofits into existing process chambers, choose ...

• GC3 one-box chuck, gas, and wafer lift control; or
• DR6 system controls.

Replace existing system controls with DepEtchPro software for:

• rapid upgrade to a modern PC without programming;
• full user control;
• unlimited system extensions; and
• process monitoring.