Electrogrip support services:
- tutorials on electrostatic chuck operation and installation
- courses on vacuum technology and plasma processing
- on-site diagnosis of electrostatic chuck problems
- system vacuum and thermal design to meet stringent requirements
- installation / system qualification of Electrogrip chucks
- assurance of operation to specification under process conditions
Please email us for more information.
For retrofits into existing process chambers, choose ...
- GC3 one-box chuck, gas, and wafer lift control; or
- DR6 system controls.
Replace existing system controls with DepEtchPro software for:
- rapid upgrade to a modern PC without programming;
- full user control;
- unlimited system extensions; and
- process monitoring.