Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

The CP series Service Bases are named SB125, SB200, and SB300 for their respective maximum wafer sizes. They share a common mounting pattern;

Service Base connection detail

An example of a service base rear with attached wafer lift motor;

Service base with motor drive rear view

Note that the service base is held with internal screw tension mounts. No screws or insulators apart from a single ceramic ring are exposed to the vacuum. If desired the outer ring of socket head screws may be used to attach the service base. In that case, no chamber screw mounting holes are required; simply a central mounting hole..

Rear view plain service base