Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

CP style chuck performance gripping a standard silicon wafer is shown below.

Grip performance of CP chuck with Silicon wafer; backpressure and He leakage

A typical 10 Torr backpressure yields 0.05 sccm He leakage, with a 'popoff' pressure of more than 40 Torr.