Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems

High temperature electrostatic chucks are available for the ranges

-60 to +400 deg. C, and for 350 to 600 deg. C.

Different materials and constructions are used in these two ranges.

Below is shown a top and backside view of a 350 - 600 deg. C high temperature chuck.

High Temperature Chuck top view

These chucks are supplied with water-cooled and guarded ceramic rf isolation, and

knife-seal vacuum flanges..

High Temperature Chuck backside connections