Electrogrip Advanced Electrostatic Gripping Solutions - Electrostatic Chucks, Electrostatic Chuck Power Supplies, High Voltage Power Supplies, Control Sytems, Vacuum Systems


Learn process design, machine selection, system control, and endpoint monitoring in a practical course with discussions:

  • Surface processes for impinging species
  • Dc discharge operation
  • Rf equipment
  • Rf discharges
  • Rf process chamber styles
  • Plasma process control methods
  • Plasma processes at surfaces
  • Etch and deposition methods and tradeoffs
  • Surface damage
  • Monitoring methods
  • Electrostatic chuck application

Instructor Biography

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