ELECTROGRIP MANUFACTURES
- Electrostatic chucks, for:
- Semiconductor wafers
- Flat panel glass
- Flexible foils
- EUV reticles
- And more
- Electronics:
- High performance chuck power supplies
- In-vacuum servomotor systems
- Integrated system monitoring and control
- All this, on motion- and rf- isolated chuck heads
- Systems:
- All required chuck support hardware and controllers
- Design and commissioning of complete integrated vacuum subassemblies with chucks, motors, electronics, gas feeds, rf feed, coolant systems, etc.
The above equipment is covered by the following US Patents, and by other US and International patents issued and pending: 5,103,367; 5,325,261; 6,922,324 B1
- Electrogrip 6945 - 6949 Lynn Way, Pittsburgh, PA 15208 USA
- Phone: 412-247-0992, -0993 Fax: 412-362-0991
- www.electrogrip.com; mail@electrogrip.com