ELECTROGRIP DR4 CHUCK POWER DRIVER SYSTEM

Electrogrip DR4 chuck drivers use novel patented techology to enable adaptive electrostatic chuck drive. The BD3 decoupler is required for rf-powered chuck applications. This is a legacy line that is supported by Electrogrip for existing installations.

Legacy systems made by Electrogrip are still supported but are not recommended for new design. These include the DR4 driver, BD3 bias decoupler filter, and GC2 system controller.