ELECTROGRIP CHUCK POWER DRIVER SYSTEMS

Electrogrip chuck drivers use novel patented techology to enable new electrostatic chuck applications. Power and signals travel in open space between a base station, and a chuck with its attached high voltage unit. A single base station can communicate with, and power, up to 250 chuck, telemetry, and motor modules in this manner.

• This complete isolation between base station and chucks permits operation of chucks:
  • At megavolt levels
  • With rf applied in any voltage and frequency combination
  • While translating and rotating
  • On robot arms without moving wiring
  • With motor drives powered at, and moving with, chucks
  • With extensive control and monitoring in chucks during processes
• Components used in this Electrogrip system are:
  • Base station
  • Selection of uniformly sized potted remote modules
  • One or more chained power couplers as needed:
    • DR5A - base station, 1/8 DIN case size
    • Power coupler(s) using rf or infrared power transfer
    • DR5V - up to +/- 10kV output chuck power module
    • DR5P - adds analog & digital I/O ports, and four additional bipolar high voltage outputs
    • DR5S - servomotor power for up to 5A continuous at 10V output
    • DR5M - servo drive motor module

More details on connections between the above modules are given in our Multidrop section.

Legacy systems made by Electrogrip are still supported but are not recommended for new design. These include the DR4 driver, BD3 bias decoupler filter, and GC2 system controller.