Controls wafer lift, gas feed, driver timing for reliable load, backfill, grip, rf power, purge, release, and unload functions.

Electrogrip's GC series 'system controllers' use stepper motor wafer lift or pneumatic wafer lift, with Hall effect position sensing. Requires MFC, purge valve, and pressure sensor. Compatible with DR5 and DR4 drivers.

Legacy equipment; most functions now performed by DR5A and DR5M units, together with a host PC. Useful if single-wire command for process start is required, such as in equipment retrofits.