ELECTROGRIP INTERFACE ENCLOSURE

Placed underneath an rf chuck to shield wiring between chuck and rf match network, and to provide grounded connection points for wiring, fluids, and interlock switching:

• Thick 10mm (3/8”) Al metal construction
  
• Encloses and isolates all chuck connections
  
• DR5VI and RFF-1 module mounts on one side permit chuck, motor powering.
• Service access provided on two sides
  
• One side available for rf match network mounting
  
• Chuck heater rf filter coils may be mounted on bottom
  
• Small 200mm (8”) cube size
  
• Optional high temperature chuck rf filter coils are shown in figure above.