Lift motors handle 4kg weight - 40N force - with 1 micron resolution, at high speed, and in vacuum.

This in-vacuum servomotor has its 1 micron encoder and drive wiring metal-encapsulated for full UHV vacuum compatibility. Mounts at an electrostatic chuck for simplest mechanics and electronic control. The DR5M motor drive module handles limit / home switching and DR5A base station commands, and also can be mounted in vacuum if required.

A longer, smaller diameter motor is also available with 10 micron resolution and lower peak force rating, but with only the rotor in vacuum. Windings and encoder are in air, separated from vacuum by a stainless steel tubular wall.

A complete isolated in-vacuum multi-axis servomotor system requires a single DR5S power module plus individual multidropped DR5M servomotor drive modules for each motor, all obtaining power and communicating remotely with a DR5A 'base station'.

Legacy-system stepper motor assemblies with Hall effect height sensing are also supported.