PRODUCT OVERVIEW: ELECTROSTATIC CHUCKS, SUPPORT EQUIPMENT, SYSTEMS
ELECTROSTATIC CHUCKS grip substrates to raise process speed and uniformity...
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...in the newest lithographic exposure tools. |
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...at atmospheric pressure on inspection stages. |
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...in vacuum high density plasma machines. |
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SUPPORT EQUIPMENT makes the system integrator's job easier with...
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...vacuum service bases for rf-isolated chucks. |  |
... totally isolated telemetered systems that don't need wiring for connections. | |
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...high performance electrostatic chuck power supplies. |
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...servomotors and drives that operate in vacuum. |
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...gas / rf breaks for system plumbing. |
...interface hardware for rf shielding and transducer wiring. |
for smooth multifunction control.