Electrostatic Chuck: High Voltage Power Supply Manufacturer
Custom systems, software controls, system simulation and finished system qualification.
Specialty electrostatic chucks and motion systems.
CNC Laser machining stations
Clean room chuck Construction, Test, and Packaging ...
Chuck Construction Equipment; 1000mm x 1000mm clean room vacuum capability
300mm Chuck Test Stations
Large chuck capability; up to 1500mm x 1200mm in-vacuum construction
Surface scanning, SEM/EDX, and particle measurements.