Electrogrip equipment is covered by the following US Patents, and by other US and International patents issued and pending:

1. 4,521,286 - Hollow Cathode Sputter Etcher
2. 5,103,367 - Electrostatic Chuck using A.C. Field Excitation
3. 5,325,261 - Electrostatic Chuck with Improved Release
4. 6,922,324 B1 - Remote Powering of Electrostatic Chucks
5. 9,910,488 - Pressure-Based Gas Flow Controller with Dynamic Self-Calibration