US Patents

Electrogrip equipment is covered by the following US Patents, and by other US and International patents issued and pending:

  1. 4,521,286 - Hollow Cathode Sputter Etcher
  2. 5,103,367 - Electrostatic Chuck using A.C. Field Excitation
  3. 5,325,261 - Electrostatic Chuck with Improved Release
  4. 6,922,324 B1 - Remote Powering of Electrostatic Chucks
  5. 9,910,488 - Pressure-Based Gas Flow Controller with Dynamic Self-Calibration

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