ElectroGrip Support: Semiconductor Support Services

Electrogrip support services:

  • tutorials on electrostatic chuck operation and installation
  • courses on vacuum technology and plasma processing
  • on-site diagnosis of electrostatic chuck problems
  • system vacuum and thermal design to meet stringent requirements
  • installation / system qualification of Electrogrip chucks
  • assurance of operation to specification under process conditions

For great solutions and experienced support ...