BD3V1 Radio Frequency Filter

The BD3 'bias decoupler' filter removes radio-frequency high-voltage chuck signals

The BD3 is used at chuck shield enclosures,

The BD3 is available in dual-frequency models;

  • 13.56MHz is the typical base frequency and with
  • a second frequency typically being 4MHz or 380kHz.

These frequencies should be specified upon ordering.

The maximum rated voltages for the BD3 rev.4 are

  • 6kV dc on chuck electrode wires, and
  • 2kVp-p rf of either rated frequency.

WARNING: Earlier models of the BD3 should be upgraded to the Rev.4 revision

... if the full rated 6kV chuck electrode drive is applied, and

... the chuck is chilled.

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