Custom Vacuum Systems
Cylindrical test chambers are available with ISO100 and ISO25 ports
for 200mm and 125mm CP chuck assemblies, an ISO250 chamber ...
... and for 300mm, 200mm, and 125mm CP chuck assemblies, an ISO500 chamber...
Custom vacuum systems, and retrofits into existing systems, are also available.
Electrogrip has extensive in-house and customer system design experience ...
- Mechanical, flow, and thermal simulation;
- Mechanical design and fabrication;
- Software system automation.
DepEtchPro control software permits rapid automation, without programming:
- Process systems and robotic motion control are automated with job files and icon setup.
- Always under user control, hence permitting unlimited field upgrades.