DR4 Driver Electrostatic Chuck Power Supply

The DR4 driver is a high-voltage power supply with

  • adaptive grip and release;
  • two bipolar outputs capable of up to +/-6kV continuous output, and
  • outputs may be floated up to 4kV from ground at plasma bias potential.

The DR4 requires a BD3 filter at the chuck location for rf applications.

The DR4 can communicate using its

  • serial RS-232 port;
  • parallel port;
  • front panel manual controls.

The DR4 has wafer sense outputs which allow wafer location to be used for robotic control.

Download the DR4 Manual

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