DR4 Driver Electrostatic Chuck Power Supply
The DR4 driver is a high-voltage power supply with
- adaptive grip and release;
- two bipolar outputs capable of up to +/-6kV continuous output, and
- outputs may be floated up to 4kV from ground at plasma bias potential.
The DR4 requires a BD3 filter at the chuck location for rf applications.
The DR4 can communicate using its
- serial RS-232 port;
- parallel port;
- front panel manual controls.
The DR4 has wafer sense outputs which allow wafer location to be used for robotic control.
