DR6 Inductive Power Transfer System
The DR6 system employs a DR6A 'base station' which connects between the
- machine host computer and a DR6V high voltage module.
The DR6A can communicate in various modes:
- fully digital serial or parallel port ...
... Or in analog emulation mode to provide 'plug and play' replacement
- for existing electrostatic chuck power supplies;
The High Voltage DR6V module comes in three forms:
- High current output;
DR6VI rf-isolated, including telemetry of plasma bias voltage
- and rf peak-to-peak voltage (independent of rf frequency);
Or, the DR6V basic high voltage module, roughly palm-sized;
All DR6 units deliver current readouts with 1nA precision and up to 3mA full scale.
Wafer sensing is precise and stable, permitting analysis of grip status;