The DR6 system employs a DR6A 'base station' which connects between the

• machine host computer and a DR6V high voltage module.

The DR6A can communicate in various modes:

• fully digital serial or parallel port ...

... Or in analog emulation mode to provide 'plug and play' replacement

• for existing electrostatic chuck power supplies;

The High Voltage DR6V module comes in three forms:

• High current output;

DR6VI rf-isolated, including telemetry of plasma bias voltage

• and rf peak-to-peak voltage (independent of rf frequency);

Or, the DR6V basic high voltage module, roughly palm-sized;

All DR6 units deliver current readouts with 1nA precision and up to 3mA full scale.

Wafer sensing is precise and stable, permitting analysis of grip status;

Download the DR6 Manual