Electrostatic Chuck Accessories
High voltage ceramic feed pins;

Wiring harness and sockets for chuck power;

Chuck Surround 99.5% Alumina Rings;



Guard Rings for the CP125, CP200, and CP300 sizes;

Ceramic rf break and vacuum seal ring;

Tension Rings for rf-isolated service base attachment;

High voltage DR5VI /DR6VI connector plugs;

CP changeover tool set;
Shipping and storage case;
