Electrostatic Chuck Puck

'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base.

  • A "Chuck Surround" Alumina ring mounts on Chuck Pucks around their active area.
  • Standard CP chucks operate between -60 and +120 deg. C.

Electrogrip stocks CP chuck bodies, service bases, and surround rings in three size ranges:

  • CP125 for 76-125mm wafers;
  • CP200 for 76-200mm wafers;
  • CP300 for 76-300mm wafers.
contact pins, ceramic insulated
CP series chuck high voltage connection cable

These pucks can grip

  • semiconductor wafers,
  • glass,
  • sapphire,
  • ceramic,
  • ... and other materials.

The CP Service Base provides

  • backfill gas, thermal control liquid lines,
  • rf feed and isolation,
  • plasma guard ring,
  • wafer lift,
  • electrical connections, and
  • vacuum-air sealing.

The CP Service Bases of all sizes have a common connection

  • requiring an approx. 100mm diameter baseplate mounting hole.

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