Endura Retrofit Wafer Chucks

Sapphire wafer 100mm system retrofit shown below:

Interface Enclosure with Heater Filter

This system uses the standard CP series chuck range with standard service base and lifters:

Gas Break, GB3 angled

Magnetically-coupled lift for highest chamber purity, with DR6VI high voltage chuck driver and GB-4 gas break shown in bottom chuck connection box.

Outrider Linear Actuator with 1 micron precision

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