GC-3 System Controller

Electrostatic chuck controls must be coordinated with gas backfill and wafer lift.

Electrogrip provides solutions where existing controls are not available:

The GC-3 system controller permits an existing system to

  • accept a retrofit electrostatic chuck,
  • require only one input signal to drive:
  • flow controller and gas valves to perform gas backfill and purge,
  • turn the DR4/DR5/DR6 grip command on and off,
  • drive a motor to raise and lower wafers, and
  • run process with the required gas, rf, etc.

Download the GC-3 Manual

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