Here is a SELF-CALIBRATING, GAS-INDEPENDENT, UNFOULABLE GFC ...

Easily REPLACE these MFCs which can foul, lose calibration, and are gas-dependent ...

Electrogrip's GFC-2 flow controller features:

• WIDE RANGE of flow capabilities from 0.05sccm to 3slpm and more;
• HIGH ACCURACY of 0.1% of flow over a wide range;
• NO ZERO DRIFT;
• UPSTREAM PRESSURE INDEPENDENCE;
• FAST ATTACK time to preset calibrated flow setting, even from ZERO INITIAL FLOW;
• AUTO-CALIBRATION during operation saves on preventive maintenance;
• WARNS USER when fouling is detected but MAINTAINS CORRECT FLOW RATE;
• GAS-INDEPENDENT CALIBRATION reduces inventory;
• UTLRA LOW FLOW model; <0.05sccm through 3sccm He to permit rapid chuck backfill
• with fine control at the actual chuck leakage rate, typically 0.05-0.1sccm;

The GFC series enables quick interchange with standard MFCs:

• same mechanical outline,
• 4-VCR connectors on standard model, and
• 15-pin analog connector.

The GFC series is available with

• DeviceNet,
• RS-485,
• USB, and
• RS-232 digital communications protocols.

For more information, please request gfc data.

HOW IT WORKS ...

COMPARE WITH Mass Flow Controllers (MFCs), which use an indirect thermal transfer method to estimate gas flow.

MFCs are gas-dependent, position sensitive, exhibit zero drift, are easily contaminated, and are sensitive to upstream pressure variations;

The GFC has few internal components, but uses fundamental principles to determine gas flow in real time;

GFC flow control uses a small cyclic pressure variation in its Flow Sense Volume; this ~0.1% pressure variation yields real-time, absolutely calibrated gas flow with unmeasurably small downstream flow and pressure variations.

RESULT: Gas flow rate is dynamically controlled, independent of zero drift, gas type, system fouling, upstream pressure, GFC orientation, etc.