High Temperature Electrostatic Chucks

High temperature electrostatic chucks are available for the ranges

  • -60 to +400 deg. C, and for 350 to 600 deg. C.
  • Different materials and constructions are used in these two ranges.

Below is shown a top and backside view of a 350 - 600 deg. C high temperature chuck.

These chucks are supplied with water-cooled and guarded ceramic rf isolation, and

  • knife-seal vacuum flanges..

For great solutions and experienced support ...