High Temperature Electrostatic Chucks
High temperature electrostatic chucks are available for the ranges
- -60 to +400 deg. C, and for 350 to 600 deg. C.
- Different materials and constructions are used in these two ranges.
Below is shown a top and backside view of a 350 - 600 deg. C high temperature chuck.
These chucks are supplied with water-cooled and guarded ceramic rf isolation, and
- knife-seal vacuum flanges..