Drytek/LAM Retrofit 384T

Future-Proof your 384T 200mm systems

... while also permitting use of 150mm wafers ...

Change to plasma-cleanable chuck systems with long life and superb uniformity

Below is shown a robust rf gas break assembly; click to expand

Complete retrofit kit yields simple maintenance and guaranteed performance with all consumable rings and replacement parts available.

For great solutions and experienced support ...

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