RF Shielded Enclosures | Interface Enclosures
Shield boxes ...
Electrostatic chucks in radio-frequency plasma process chambers require
- shielded base connections in a shielding 'Interface Enclosure'.
The shield box below has central heater rf filter coils, and electronics boxes.
Shield boxes may also be custom-designed for more complex applications.
Typical shield box setup is shown below with
- flow control, and
- bypass valving.
- lift motor filters,
- DR6VI chuck high voltage drive, and
- interlock switching.
- On the far or bottom side an rf match network would be attached.