RF Shielded Enclosures | Interface Enclosures

Shield boxes ...

Electrostatic chucks in radio-frequency plasma process chambers require

  • shielded base connections in a shielding 'Interface Enclosure'.

The shield box below has central heater rf filter coils, and electronics boxes.

Shield boxes may also be custom-designed for more complex applications.

Typical shield box setup is shown below with

Backpressure controls:

  • sensor,
  • flow control, and
  • bypass valving.


  • lift motor filters,
  • DR6VI chuck high voltage drive, and
  • interlock switching.
  • On the far or bottom side an rf match network would be attached.

For great solutions and experienced support ...