The shield box below has central heater rf filter coils, and electronics boxes.

Shield boxes may also be custom-designed for more complex applications.

Typical shield box setup is shown below with

Backpressure controls:

• sensor,
• flow control, and
• bypass valving.

Electronics:

• lift motor filters,
• DR6VI chuck high voltage drive, and
• interlock switching.
• On the far or bottom side an rf match network would be attached.