Water Lift Pneumatic Actuators and Motors
Wafer Lift Pneumatic Actuators and Motors
Pneumatic lift assembly in a PVD system retrofit ...
- magnetic coupling to the in-vacuum lift rod, and rf isolation:
3-Phase BLDC Servo drives are also available for precision wafer lift with:
- UHV-compatible rotors inside vacuum;
- drive coils outside vacuum
- linear resolution of 30 micron (8mm rotor) or
- 1 micron (30mm rotor, shown below).