Pneumatic lift assembly in a PVD system retrofit ...

• magnetic coupling to the in-vacuum lift rod, and rf isolation:

3-Phase BLDC Servo drives are also available for precision wafer lift with:

• UHV-compatible rotors inside vacuum;
• drive coils outside vacuum
• linear resolution of 30 micron (8mm rotor) or
• 1 micron (30mm rotor, shown below).