Water Lift Pneumatic Actuators and Motors

Wafer Lift Pneumatic Actuators and Motors

Pneumatic lift assembly in a PVD system retrofit ...

  • magnetic coupling to the in-vacuum lift rod, and rf isolation:

3-Phase BLDC Servo drives are also available for precision wafer lift with:

  • UHV-compatible rotors inside vacuum;
  • drive coils outside vacuum
  • linear resolution of 30 micron (8mm rotor) or
  • 1 micron (30mm rotor, shown below).

For great solutions and experienced support ...

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