PLASMA PROCESSING 2-DAY COURSE ...

Learn process design, machine selection, system control, and endpoint monitoring in a practical course with discussions:

• Surface processes for impinging species
• Dc discharge operation
• Rf equipment
• Rf discharges
• Rf process chamber styles
• Plasma process control methods
• Plasma processes at surfaces
• Etch and deposition methods and tradeoffs
• Surface damage
• Monitoring methods
• Electrostatic chuck application