Amazing capability in miniature packages that fit into the palm of one hand ...

High voltage power supplies with

• 6-output 3-phase all solid-state bipolar outputs up to +/-6kV, 3mA;

Sensitive capacitance measurements on high voltage lines

• for accurate substrate position determination;

Voltage and current feedback on high voltage lines with 1nA current resolution;

Control and powering of sensors and actuators both at chuck and host controller locations;