High Voltage Power Supplies
Amazing capability in miniature packages that fit into the palm of one hand ...
High voltage power supplies with
- 6-output 3-phase all solid-state bipolar outputs up to +/-6kV, 3mA;
Sensitive capacitance measurements on high voltage lines
- for accurate substrate position determination;
Voltage and current feedback on high voltage lines with 1nA current resolution;
Control and powering of sensors and actuators both at chuck and host controller locations;